99.9999% Vapor Phase Impurities 氣相雜質(zhì) Contaminants 雜質(zhì) Specifications (ppmv) 規(guī)格 O2 Oxygen氧氣 <0.2 N2 Nitrogen氮?dú)?<0.2 H2 Hydrogen氫氣 <0.1 THC Total Hydrocarbon碳?xì)浠衔?<0.2 H2O Moisture水 <0.5 Standard Package Information 包裝規(guī)格 Cylinder Typ">